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• (author = "Perrier, Gaëlle" AND subject = "AFM")
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author = "Perrier, Gaëlle" > : "AFM" (x)
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Single-crystal silicon nanoparticles: An instability to check their synthesis

Author(s) : Cavarroc, Marjorie , Mikikian, Maxime , Perrier, Gaëlle , Boufendi, Laifa
Description : An instability occuring in electrical signals of the discharge is used as a mark to detect the end of the single-crystal silicon nanoparticle formation in Ar/SiH4 rf plasmas. Scanning electron microscopy and atomic force microscopy studies of depositions show that the exact beginning of the coalesce...
Repository : HAL - Hyper Article on Line
Language(s) : English
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