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author = "Perrier, Gaëlle"
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Single-crystal silicon nanoparticles: An instability to check their synthesis
Description :
An instability occuring in electrical signals of the discharge is used as a mark to detect the end of the single-crystal silicon nanoparticle formation in Ar/SiH4 rf plasmas. Scanning electron microscopy and atomic force microscopy studies of depositions show that the exact beginning of the coalesce...
Repository :
HAL - Hyper Article on Line
Language(s) :
English
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Found 1 documents, displaying page 1 of 1