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• (author = "Yuanwei, Y.")
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A High-Q Microwave MEMS Resonator

Author(s) : Jian, Z. , Yuanwei, Y. , Yong, Z. , Chen, Chen , Shixing, J.
Description : A High-Q microwave (K band) MEMS resonator is presented, which empolys substrate integrated waveguide (SIW) and micromachined via-hole arrays by ICP process. Nonradiation dielectric waveguide (NRD) is formed by metal filled via-hole arrays and grounded planes. The three dimensional (3D) high resisti...
Repository : HAL - Hyper Article on Line , View repository documents
Language(s) : English
Subject(s) : [INFO:INFO_OH] Computer Science/Other , [INFO:INFO_AR] Computer Science/Architecture
Publisher(s) :
Contributor(s) :
Source(s) : Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS , DTIP 2007
Publication Date(s) : 2007-04-01