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• (author = "Mikikian, Maxime")
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Single-crystal silicon nanoparticles: An instability to check their synthesis

Author(s) : Cavarroc, Marjorie , Mikikian, Maxime , Perrier, Gaëlle , Boufendi, Laifa
Description : An instability occuring in electrical signals of the discharge is used as a mark to detect the end of the single-crystal silicon nanoparticle formation in Ar/SiH4 rf plasmas. Scanning electron microscopy and atomic force microscopy studies of depositions show that the exact beginning of the coalesce...
Repository : HAL - Hyper Article on Line , View repository documents
Language(s) : English
Subject(s) : [SPI:PLASMA] Engineering Sciences/Plasmas , [PHYS:PHYS:PHYS_PLASM-PH] Physics/Physics/Plasma Physics , Dusty plasma , Complex plasma , Dust particle , Nanoparticle , Silicon , Silane , Deposition , Nanostrutured materials , Electron microscopy , MEB , AFM , Nanocrystal
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Source(s) : Applied Physics Letters
Publication Date(s) : 2006-01-01